ANALYSIS OF VALVELESS PIEZOELECTRIC MICROPuMP USING ELECTRICAL EQUIVALENT CIRCUIT MODEL

摘要

An improved equivalent circuit model for effective calculation of a valveless piezoelectric micropump performance which is operated by a dependency of flow resistance on flow rate was proposed. The validity of the proposed model was evaluated by comparing the dynamic flow behavior calculated by the equivalent circuit model with μ-PIV measurement. From the good agreements between the analysis and the experimental results, it was concluded that a dynamic flow characteristic with microsecond scale of the micropump was able to be analyzed precisely by the developed equivalent circuit model.