A NOVEL TILTING MICROMIRROR WITH A TRIANGULAR WAVEFORM RESONANCE RESPONSE AND AN ADJUSTABLE RESONANCE FREQUENCY FOR RASTER SCANNING APPLICATIONS

摘要

We present a novel tilting micro-mirror that has a triangular waveform resonance response, and a resonance frequency that can be continuously and reversibly adjusted. The triangular waveform and the adjustability of the resonance frequency are crucially important for raster-scanning applications. Although the mirror is driven by electrostatic forces, the triangular waveform is achieved by mechanical means. Our micro-mirror is driven by up to 60 Volts whereas to achieve the same waveform without the novel mechanical design would require extremely high voltages.