STUDY OF VIBRATION-INDUCED BROADBAND FLEXIBLE PIEZOELECTRIC ZNO MICRO-HARVESTER WITH STORAGE SYSTEM

摘要

The development of a flexible PET-based (polyethylene terephthalate; PET) vibrational energy harvesting system with broadband width was presented. That comprises of four sets of one single ZnO (zinc oxide) piezoelectric generator in the form of cantilever structure connected in parallel, and the rectifying circuit with storage module. The design of the cantilever structure was carried out by using commercial software ANSYS FEA (Finite Element Analysis). An optimal thickness of PET substrate is determined as 100μm. A single piezoelectric harvester consists of selectively deposited UV-curable resin lump structure. The result reveals that one single harvester achieves a maximum OCV (open-circuit voltage) up to 4V with power density of 1.247μW/cm~2. So far, we succeeded in accomplishing a broadband width system with operating frequency range from 100Hz to 450Hz to enhance powering efficiency.