Grinding performance evaluation of the developed chemo-mechanical grinding (CMG) tools for sapphire substrate

摘要

In order to improve the surface quality of sapphire substrates ground by diamond wheel, the chemo-mechanical grinding (CMG) tools for sapphire grinding was investigated in this paper. According to the processing principle of CMG, three CMG tools with different abrasives of SiO_2, Fe_2O_3 and MgO were developed respectively. The compositions of the CMG tools were designed and optimized based on the physicochemical characteristics of sapphire. The grinding experiments were performed with the developed CMG tools and the grinding performance of three kind of tools were evaluated by comparing the surface roughness and the MRR of sapphire. The experiment results show that the grinding performance of SiO_2 CMG tool was worst. The surface roughness and MRR corresponding to SiO_2 CMG tool were all significantly poorer than Fe_2O_3 and MgO CMG tools. The highest MRR could be obtained by Fe_2O_3 CMG tool, but the best surface quality was obtained by MgO CMG tool.