Effect of Material Type and Tip Radius of AFM Probes on Nanosheets Groove Machining Accuracy

摘要

This paper presents results of groove machining of potassium niobate nanosheets using an atomic force microscope (AFM). Groove machining operations are performed using recently developed diamond coating (DC) and super sharp silicon (sss) probes. The results obtained using these probes are compared to results obtained using a conventional silicon (Si) probe in order to examine the effects of the material type and the tip radius of the AFM probe on groove machining accuracy.