Automated OPC Model Collection, Cleaning and Calibration Flow

摘要

OPC model calibration requires thousands of experimental data points. These are then used to calibrate an OPC model.Today, the majority of these steps are performed manually. Metrology for example involves taking the CD-SEM offlinefor an operator to program it. Considerable time savings is possible by writing the CD-SEM recipe offline.Experimental data preparation is also often performed manually. Manual review of thousands of data points is a tedioustask prone to human errors. Here again, automation can greatly alleviate the engineering effort, reduce cycle-time andimprove data quality. Data quality improvement alone has been shown to have a significant benefit to model calibrationaccuracy and predictability [1]. In this paper we present an automated solution for the currently engineering effort intensive components of the OPCmodel calibration flow. The flow we present is integrated inside the OPC environment. We suggest best practicesidentified through the implementation of an automated flow, and discuss benefits. Our results demonstrate the capabilityand quantify the benefits which automation brings in human effort, reduced time to accurate model and improved modelquality.