Automatic and high-efficiency nano-precision manufacturing technique of optical elements surface with sub-nanometer rms surface microroughness, λ/10～λ/20 nm figure accuracy, and damage-free is greatly demanded by advanced optical fields. In conventional grinding process, problems such as wheel loading and glazing can be encountered while grinding optical elements with fine abrasive wheels [1][2]. However, ELID is an efficient method to dress the grinding wheel while performing grinding for a long time. Grinding optical elements using ELID technique is also viable alternative and effective [3][4]. However, in grinding, surface produced by fixed abrasive grinding of these optical materials is characterized by considerable sub-surface damage, micro-crack on the order of the abrasive grain size. This damage [5] should be typically removed by polishing with a friable abrasive such as cerium or aluminum oxide. Therefore, for realizing the extreme precision and surface micro-finish, we considered to seek a best polishing method.
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