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A Novel Thermal Spectrum Analysis Method for Reliability Analysis of Semiconductor Devices

机译:一种新的半导体器件可靠性分析的热谱分析方法

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As a new concept and method, thermal spectrum analysis, is introduced to characterize non-uniform property of junction temperature distribution in this paper. Unlike common infrared image, the proposed thermal spectrum analysis aims at the active region of power devices and provides a quantificational analysis method to effectively investigate thermotics reliability. Both the thermal spectrum curves and the one-dimension temperature distribution curves are given via quantitative and qualitative analysis base on infrared images. The one-dimension temperature distribution curve brings the high readability and convenience for characterizing uniform property and calculating non-uniform degree. The junction temperature distribution of the active region of power devices, peak junction temperature and minimum junction temperature are given in the proposed method. The average junction temperature is calculated through the one-dimension temperature distribution curves. The proposed thermal spectrum analysis, as a new concept, has inducted a novel approach of analyzing temperature distribution of devices. Moreover, the thermal spectrum proposed in this paper will induct a new approach of detecting temperature distribution via complete electrical method, and will create significant impact for the reliability analysis of semiconductor devices.
机译:作为一种新的概念和方法,引入了热谱分析,以表征了本文的结温分布的非均匀性。与常见的红外图像不同,所提出的热谱分析旨在瞄准功率器件的有源区,并提供量化分析方法,以有效地研究热电部可靠性。热谱曲线和一维温度分布曲线都通过红外图像上的定量和定性分析基础给出。一维温度分布曲线为表征均匀性和计算非均匀度来带来高可读性和便利性。以所提出的方法给出了功率器件的有源区,峰值结温和最小结温的有源区的结温分布。通过单尺寸温度分布曲线计算平均结温。所提出的热谱分析作为一种新概念,它引用了一种分析设备温度分布的新方法。此外,本文提出的热谱将引导通过完整的电气方法检测温度分布的新方法,并将为半导体器件的可靠性分析产生显着影响。

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