Preparation of (001) oriented Pb(Zr,Ti)O3 thin films and their piezoelectric applications

摘要

Preparation of (001) oriented Pb(Zr,Ti)O3 (PZT) thin films and their applications to a sensor and actuators were investigated. The (001) oriented PZT thin films were epitaxicially grown on (100)Pt/(100)MgO single crystal substrates by rf-magnetron sputtering. The PZT thin films on (100)Pt/(100)MgO buffer layer/glass substrates and (111)Pt/Ti/Si substrates also had high (001) orientation. All of these thin films showed the excellent piezoelectric properties without a poling treatment. These PZT thin films were applied to the angular rate sensor with a tuning fork for a car navigation system, the dual-stage actuator for positioning a magnetic head of high-density hard disk drive (HDD) and the actuator for a inkjet printer head.