We fabricated two types of ferroelectric tunable capacitors, which were metal- insulator- metal structure (MIM) and interdigital electrodes structure (IDE) using (Ba{sub}0.7Sr{sub}0.3)TiO{sub}3 (BST) thin films prepared by chemical solution decomposition (CSD) method. These films showed grained structure and crystalline properties were randomly oriented. Dielectric tunability of MIM structures was -52%/6V and that of IDE structures was -50%/15V, at 2GHz respectively. Quality factor of IDE structures was higher than that of MIM structures.
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