Industrially-scaled large-area and high-rate tribological coating by Pulsed Laser Deposition

摘要

At the moment, the PLD technique is accounted as a well-established laboratory coating technology. However, the missing of PLD coating systems, which fulfill the requirements for industrial applications–mainly, high rate and large-area deposition–is considered as one of the main obstacles for the industrial breakthrough. This paper addresses the techniques of industrial scale-up and the potential applications of the Pulsed Laser Deposition (PLD) shown by the example of tribological coatings deposited by the industrially-scaled PLD coater at Laser Center Leoben of JOANNEUM RESEARCH Forschungsgesellschaft mbH in Austria. Future prospects and potentialities of the industriallyused PLD technique are given based on the HybridPLD technique combining PLD, magnetron sputtering and ion-assisted surface activation/ film deposition.