Dynamic Modelling and Vibration Control of a Turbomolecular Pump with Magnetic Bearings in the Presence of Blade Flexibility

摘要

This article presents the development of a tridimensional phenomenological model of a turbomolecular pump taking into account the blades dynamics as well as the gyroscopic effects, centrifugal stiffening and spin softening. Rotor and blades behavior is approximated by Euler-Bernoulli beams. Rayleigh-Ritz method is used to approximate continuous displacements and an energetic approach is used to obtain the equations of motion. The global dynamics of the system is analyzed by assuming linear bearings, whose stiffness is experimentally defined. Mistuning of the blades is experimentally identified and simulated so that its influence on blades modes organization could be studied. The obtained model has shown good correlation with experimental results.