Data Collection of Chemicals Used in Microelectronic Manufacturing Processes for Environmental Studies

摘要

Microelectronics, like other modern industries engages measures to improve their environmental performances. One way to reduce the impacts of microelectronic technologies is to study the manufacturing chain and particularly, the chemical inputs used in the processes: good control would open the way to improvement. However control relies on reliable data. This is not an easy job in large manufacturing plants producing many different technologies simultaneously. Two data collection methods that measure chemical consumptions are developed, analyzed and compared in this paper: a bottom-up study of production recipes, and a top-down global approach. The methods were applied to chemical-mechanical planarization processes.