Theoretical Study of Laser-Stimulated Chemical Vapor Deposition Processes of Importance in Microelectronics

摘要

Recent experiments have demonstrated that laser radiation incident on a gas surface interface can stimulate and control the process of vapor deposition onto the surface. This research project has been a theoretical analysis of the deposition and related laser-stimulated processes, with special attention given to the microscopic dynamics of energy flow associated with such processes. (Author)