Formation and Properties of Iron-Phosphorus and Iron-Phosphorus-Hydrogen Complexes in Silicon

摘要

Hitherto unreported ESR signal, labeled TU10, was detected after annealing of electron-irradiated silicon samples doped with phosphorus, iron and hydrogen. The ESR spectrum corresponds to a complex having monoclinic-I symmetry and S = 3/2 spin-state. Hyperfine structure of the TU10 spectrum suggests participation of two nucleus with spin I = 1/2 and 100% abundance in the core of the related defect. Doping of samples with hydrogen-deuterium mixture revealed presence of one hydrogen atom in the complex. The second nucleus with I = 1/2 is apparently a phosphorus atom. Presence of single iron atom was verified by doping with iron heaving modified isotope content. An intensity of the previously reported TU6 signal, related to iron-phosphorus complex, was significantly suppressed in hydrogen-doped samples.