Development of LTCC Smart Channels for Integrated Chemical, Temperature, and Flow Sensing

摘要

This paper describes the development of "smart" channels that can be used simultaneously as a fluid channel and as an integrated chemical, temperature, and flow sensor. The uniqueness of this device lies in the fabrication and processing of low-temperature co-fired ceramic (LTCC) materials that act as the common substrate for both the sensors and the channel itself. Devices developed in this study have employed rolled LTCC tubes, but grooves or other channel shapes can be fabricated depending on the application requirements. The chemical transducer is fabricated by depositing a conductive polymer "ink" across a pair of electrodes that acts as a chemical resistor (chemiresistor) within the rolled LTCC tube. Volatile organic compounds passing through the tube are absorbed into the polymers, causing the polymers to reversibly swell and change in electrical resistance. The change in resistance is calibrated to the chemical concentration. Multiple chemiresistors have been integrated into a single smart channel to provide chemical discrimination through the use of different polymers. A heating element is embedded in the rolled tube to maintain a constant temperature in the vicinity of the chemical sensors. Thick-film thermistor lines are printed to monitor the temperature near the chemical sensor and at upstream locations to monitor the incoming ambient flow. The thermistors and heating element are used together as a thermal anemometer to measure the flow rate through the tube. Configurations using both surface-printed and suspended thermistors have been evaluated.