FABRICATION OF REFERENCE ELECTRODES FOR LTCC MINIATURIZED CHEMICAL SENSORS

摘要

An ideal reference electrode has a stable, well-defined electrochemical potential, because of their reversibility and their low overpotential, silver/silver chloride (Ag/AgCl) electrodes have been used widely as reference electrodes. In this work, (Ag/AgCl) reference electrodes are presented. Several silver available pastes and chlorination methods were tested using different material layers deposited in LTCC substrates. The characterization of fabricated reference electrodes has been done comparing them with commercial reference electrodes. Applications in meso-analytical systems are also presented.