Template-Based Surface Nano-Patterning and Device Applications

摘要

Surface nano-patterns on substrates are the fundamental structures of various nano-devices. Template-based surface nano-patterning techniques are highly efficient methods in realizing different surface nano-patterns. The time-saving and low-cost fabrication processes of the UTAM (ultra-thin alumina membranes) template-based surface patterning are highly desirable for industry in fabricating different kinds of nano-devices. This manuscript summarizes the recent advancements in the field of UTAM template based surface nano-patterning, the basic concepts, the general fabrication processes, the structure-related properties, and the device applications of these template-based surface nano-patterning techniques are introduced.