Microscopic Scattering Imaging System of Defects on Ultra-Smooth Surface Suitable For Digital Image Processing

摘要

In this paper the defects' harm is pointed out and previously used inspection techniques are reviewed, and then a new measurement of defects--microscopic scattering imaging system suitable for digital image processing is put forward, which can detect defects in random distribution and random shape on the surface of optical component with large aperture. The imaging system is a 0.7x ～ 4.5xzoom microscope. Multi-beam fiber optic illuminators are evenly distributed in annularity, and illuminate the detected surface with a special angle a; in the image are bright defects in black background, what is suitable for digital image processing; match defects to a set of standard defects and assess the dimensions of defects accurately. In the new system, the lateral resolution is approximately 1μm or even smaller, and the image and experimental results are very good. The experiment result has been proved by Scanning Electron Microscope (SEM).