Analysis of pinhole vector diffraction in visible light

摘要

Using Hartmann-Shack (H-S) wave-front sensor to test lenses with high numerical aperture, the reference spherical wave-front from pinhole is used to calibrate the Hartmann sensor to improve the precision of calibration, but intensity uniformity of the reference spherical wave-front affects the precision of Hartmann sensor's calibration. Based on the vector diffraction theory, intensity uniformity is calculated with finite-difference time-domain method in case of a converging Gaussian incident visible light on pinhole. In order to proof the correctness of the intensity model of pinhole vector diffraction, experimentation of intensity is performed in visible-light. When the pinhole is the material aluminum with thickness 200nm and pinhole diameter 500nm, the absolute error of intensity uniformity is about 2.57% and 2.31% within 0.75 NA and 0.5 NA of diffracted wave-front by comparing experiment result with simulation result, so the intensity model is accurate.? (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.