NANOCOMPOSITE MO-CU-N COATINGS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING PROCESS WITH A SINGLE ALLOYING TARGET

摘要

In this study, it has been tried to make the single Mo-Cu alloying targets with the Cu content showing the best surface hardness that was determined by investigation on the coatings with the Mo and Cu double target process. The single alloying targets were prepared by powder metallurgy methods such as mechanical alloying and spark plasma sintering. Subsequently, the nanocomposite coatings were prepared by reactive magnetron sputtering process with the single alloying targets in Ar+N_2 atmosphere. The microstructure changes of the coatings were investigated by using XRD, SEM and EDS and TEM. The mechanical properties of Mo-Cu-N coatings were evaluated by using nanoindentor. In this study, the nano-composite MoN-Cu coatings prepared using an alloying target was eventually compared with the coatings from the multiple targets.