METALLIZATION ON THE BASIS OF BINARY AND TERNARY ALLOYS FOR SUBMICRON ELEMENTS OF MEMS RF-MICROSWITCHES FORMATION

摘要

Features of suspended elements of microme-chanical structures at transition to the submicron size formation are considered. It is shown, that suspended elements of micro-mechanical structures are exposed to the greatest deforming influence during sacrificial layer removing. The ways with the submicron sizes are offered.