FABRICATION OF TWO-DIMENSIONAL pH CMOS IMAGE SENSORS AND REAL TIME IMAGING OF CHEMICAL REACTION

摘要

We present about pH image sensors, which are capable of measuring two-dimensional (2-D) distribution of various chemical reaction in real time. The pH CMOS image sensor using charge transfer technique is a novel pH sensor and imaging sensor that is capable of measuring variations on the chemical reaction as an image, and it was fabricated by CMOS (Complimentary Metal-oxide Semiconductor) circuit process technology. Prototype pH CMOS image sensors are successfully fabricated and measured two-dimensional distribution of various chemical reactions in moving image at 1/30 sec per 1 frame. It is expected that the pH CMOS image sensor is able to use for novel applications such as medical and biochemistry field.