Nanoforming of metallic glass with nano-scale die fabricated by focused ion beam

摘要

Metallic glasses exhibit perfect Newtonian viscous flow in the supercooled liquid state and excellent micro/nano-formability under very low stresses. These alloys are therefore expected to become some of the most useful materials for fabricating nano-/micro-machines(NEMS, MEMS) and devices. The present paper introduces the fabrication technique of nano-structures by superplastic nanoforming with nano-scale die of Zr-based metallic glass fabricated by focused-ion-beam(FIB) technology and describes nano-formability of Pt-based metallic glass. Dies and the die forged 1-μm-diameter micro gear, 500nm-high logo characters and 170 nm period dots for storage devices are demonstrated. Metallic glasses are highly useful as materials for nanoimprint, and as a material for FIB nanomachining.