Design of a Novel Openloop Characteristics Test System of Resonant Silicon Microsensor

机译：谐振硅 - 微传感器新型OpenLoop特性测试系统的设计

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The paper designs a novel openloop characteristics test system of resonant silicon microsensor based on the orthogonal basis correlation method. It tests the frequency characteristics of resonant silicon pressure microsensor.

机译：本文基于正交基相关方法设计了一种新的OpenLop特性测试系统的共振硅微传导料。它测试了谐振硅压力微传感器的频率特性。

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《International Conference on Electronic Measurement Instruments》|2005年||共3页
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Fan Shangchun; Xiao Zhimin;
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正文语种
中图分类电气测量技术及仪器;
关键词
orthogonal basis correlation; resonant sensor; silicon microsensor; openloop characteristics;

机译：正交的基础相关;谐振传感器;硅 - 硅片;OpenLoop特性;

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Design of a Novel Openloop Characteristics Test System of Resonant Silicon Microsensor

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