RECENT PROGRESS IN CMOS INTEGRATEDMEMS AO MIRROR DEVELOPMENT

摘要

For high-resolution optical phase control the Fraunhofer IPMS has developed a CMOS-integrated MEMS micro mirror array including 240 x 200 independently deflectable pistonmirror elements of 40μm pixel size. To further improve the actual mirror performance,amorphous TiAI has been successfully implemented as a novel CMOS-integrable actuatormaterial providing a virtually drift-free deflection. In addition, first two-level designs withseparated mirrors and hinges have been realized offering the potential of increasedmechanical stroke at improved optical fill factor. Finally, the high wavefront correctioncapability of the IPMS mirror device has been demonstrated within an AO testbed.