Hysteresis Compensation for a Piezo Deformable Mirror

摘要

The field of adaptive optics (AO) has received rapidly increasing attention in re-cent years, the intrinsic hysteresis of the piezo deformable mirror (DM) imposesa limit in the accuracy when the stroke of the piezo-actuator is on the orderof micrometers. This contribution discusses the hysteresis compensation of apiezo DM by an inverse Preisach hysteresis model. The inverse Preisach hys-teresis model is identified from the measured input-output data with a neuralnetwork and with a hinging hyperplane based approach. Experimental resultsdemonstrate that hysteresis of the piezo-actuator can be reduced from 20%to about 6% and 9% by the neural network and by the hinging hyperplanes,respectively.