Coagulation of Dust Particles in Argon Plasma ofRF Discharge

摘要

The experiments on coagulation of poly-disperse particles with various size distributions injectedinto the argon plasma of the magnetron radio-frequency discharge are discussed. The experimentswere carried out under the conditions similar to those using dusty plasma for technology applica-tions. Within the created theory the threshold behavior of the coagulation process was explained forthe first time, the estimation of the critical particle size for onset of a fast coagulation was made,and the analytical calculation of the coagulation rate of dust particles was performed. The proposedcoagulation mechanism makes it possible to describe the typical features of coagulation processesobserved in experiments and to explain the effects of attraction and coalescence of highly negativelycharged microns size particles.