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A Simple Detachment Method for Fabricating a Polymer Nanotemplate Structure

机译:一种制造聚合物纳米板结构的简单脱离方法

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In this report, nanopatterns consisting of an organic polymer film were fabricated using a simple detachment method. The method used a patterned ultraviolet (UV) curable poly(urethane acrylate) (PUA) as a mold and an organic polymer layer as a template material. A thin film was prepared by spin coating and then annealed below the glass transient temperature while in physical contact with the PUA mold. The polymer layer in contact with the mold was detached due to the difference in adhesion force, resulting in a well-defined nanoarray of the polymer template. Nanopatterns as small as 70 nra lines were fabricated using this approach.
机译:在本报告中,使用简单的脱离方法制造由有机聚合物膜组成的纳米图案。该方法使用图案化的紫外(UV)可固化聚(氨基甲酸酯丙烯酸酯)(PUA)作为模具和作为模板材料的有机聚合物层。通过旋涂制备薄膜,然后在与PUA模具的物理接触时退火。由于粘附力的差异而与模具接触的聚合物层,导致聚合物模板的明确纳米阵列。使用这种方法制造小于70 NRA线的纳米图案。

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