This research work aims to explore the feasibility of applying electrochemical machining (ECM) to micromachining. An experimental setup for micro-ECM has been developed. Lower machining voltage, lower concentration of passivity electrolyte, high-frequency short-pulse power supply and micro tool electrode rotating at high speed have been synthetically adopted to localize the dissolution area in micro-ECM, so the machining gap can be kept at about 10μm and the better resolution of machined shape is achieved. A micro-hole with 45μm diameter is drilled on the stainless steel foil with 100μm thickness. A new approach of fabricating microstructure by micro-ECM milling with a simple micro electrode is proposed, and the micro beam with width of about 50μm which has high precision is fabricated by micro-EC milling on the stainless steel foil (1Cr18Ni9Ti) with 300μm thickness. A mathematics model has been established, which can be used to simulate the process of shaping workpieces in the process of micro-ECM.
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