Simulation of micropart motion under 2D force fields implemented on a cilia microactuator array

摘要

Micromanipulation is a hot topic in the manufacturing of MEMS products. Alternatives to established manipulation techniques that have been proposed in the recent years include manipulation with force fields and microcilia actuator arrays. In this paper, a simulator for the positioning and alignment of microparts on a microcilia array under two dimensional force fields is presented. A description of its design and motion dynamics is given and the simulation results are presented and discussed.