The one-port SAW resonator coated with TiO2 film of different thickness is used to study experimentally the effect of SAW attenuation on the border between the crystal and the film. It is shown that SAW attenuation takes place in the film in thin layer of about 500 angstroms thickness. Thickness dependence of frequency shift and Q-factor of SAW oscillator and resonator are presented. Mass sensitivity of SAW resonator to TiOj film was measured to be 2.7 kHz/A.
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