A CMOS TECHNOLOGY FOR EDUCATIONAL ACTIVITIES AND ACADEMIC PROJECTS

摘要

A CMOS technology for educational activities and academic projects has been performed. The CMOS device fabrication process and electrical parameter simulations were obtained by ATHENA (from SILVACO) and PISCES software, respectively. So, CMOS devices, such as capacitors, transistors and inverters, were fabricated and their electrical parameters extracted using a HP4145B and Keitlhey 4200 SCS parameter analyzer. These experimental results were used to obtain the SPICE MOSFET level-3 static model. The SILVACO and SPICE simulations were employed to obtain CMOS device design kit. The experimental and simulated results of CMOS transistor and inverter were compared to validate the design kit. Based on this kit, a chip with digital and analogic projects has been fabricated.