3D RECONSTRUCTIONS OF MICRO-SYSTEMS USING X-RAY TOMOGRAPHIC METHODS

摘要

During the last years tomographic X-ray investigation methods have been transferred from research centers to industrial labs and have been used for research and development as well as quality control. At the moment 3-dimensional tomographic methods are introduced into production for process survey and in-line control. Furthermore there is a trend towards highly accurate tomographic systems with resolutions down to several microns or even several hundreds of nanometers resulting in new demands for those systems. Region of interest reconstruction methods have to be applied to objects with large expansion in two dimensions in order to achieve a high resolution within a small volume. For this purpose problem optimized scanning and reconstruction algorithms are necessary. In this paper we present the state of the art of high-resolution industrial X-ray CT and laminography systems. As an example a new cost effective, small and fast tabletop mini 3D-CT system is shown. It allows the usage of μ-CT in many trades as e.g. seed production, or plastics, Al-casting or electronic industry. In combination with laminographic methods as tomosynthesis or swing-laminography this system can be used as well for the inspection of flat components. First results will be presented.