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Measurement of parameters of thin film semiconductor structures by means of help millimeter waves

机译：通过帮助毫米波测量薄膜半导体结构的参数

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摘要

A new method based on application of millimeter waves for measurement of complex refractive index of thin semiconductor films on high resistive substrates is described.

机译：描述了一种基于毫米波施加用于测量高电阻基板上的薄半导体膜复合折射率的初始波的新方法。

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来源
《International Crimean Conference on Microwave and Telecommunication Technology 》|2004年||共2页
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作者
Lyubchenko V.E.; Meriakri V.V.; Chigrai E.E.;
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中图分类自动化技术、计算机技术 ;
关键词
refractive index measurement; millimetre wave measurement; semiconductor thin films; thin film semiconductor structure parameters measurement; millimeter wave application; high resistive substrates; complex refractive index measurement;

机译：折射率测量;毫米波测量;半导体薄膜;薄膜半导体结构参数测量;毫米波应用;高电阻基板;复合折射率测量;

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专利

1. Microwave and millimeter wave experimental technique and equipment for high-temperature measurements of superconducting thin films surface impedance in strong magnetic fields [J] . Poustylnik O.D. International Journal of Infrared and Millimeter Waves . 1999 ,第11期

机译：用于强磁场中超导薄膜表面阻抗高温测量的微波和毫米波实验技术和设备
2. Measurements of millimeter-wave surface resistance and temperature dependence of reactance of thin HTS films using quasi-optical dielectric resonator [J] . Cherpak N.T., Barannik A.A., Bunyaev S.A., IEEE Transactions on Applied Superconductivity . 2005 ,第2期

机译：使用准光学介质谐振器测量HTS薄膜的毫米波表面电阻和电抗的温度依赖性
3. Magnetic properties and millimeter wave loss of highly oriented scandium substituted barium hexaferrite thin films for millimeter wave applications [J] . Darning Chen, Zhuo Chen, Guijuan Wang, Journal of materials science . 2017 ,第9期

机译：毫米波应用中高度取向的scan取代六铁酸钡薄膜的磁性和毫米波损耗
4. Measurement of parameters of thin film semiconductor structures by means of help millimeter waves [C] . Lyubchenko, V.E., Meriakri, . 2004

机译：借助辅助毫米波测量薄膜半导体结构的参数
5. On-wafer millimeter wave notch filter based on barium hexagonal ferrite thin films on platinum. [D] . Harward, Ian Roylance. 2014

机译：基于铂上钡六角形铁氧体薄膜的晶圆上毫米波陷波滤波器。
6. Bulk and surface recombination properties in thin film semiconductors with different surface treatments from time-resolved photoluminescence measurements [O] . Thomas P. Weiss, Benjamin Bissig, Thomas Feurer, -1

机译：时间分辨光致发光测量中具有不同表面处理的薄膜半导体的体相和表面复合特性
7. Measurement of Millimeter-Wave Surface Resistance and Temperature Dependence of Reactance of Thin HTS Films Using Quasi-Optical Dielectric Resonator [O] . Cherpak N. T., Barannik A. A., Bunyaev S. A., 2005

机译：使用准光电介质谐振器测量HTS薄膜的毫米波表面电阻和电抗的温度依赖性

Measurement of parameters of thin film semiconductor structures by means of help millimeter waves

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