Cohesive Toughness Of Low-k Film With Periodically Changing Elastic Modulus: Cube-Corner Indentation

摘要

The through-thickness cohesive toughness is estimated by applying the cube-corner indentation method for an organosilicate glass (OSG), cured by monochromatic UV irradiation to obtain oscillating elastic moduli across the film thickness. Radial cracks induced by cube-corner indentation on as-deposited OSG film shows a straight crack path, while the indentation on OSG film with elastic modulus oscillation shows a disturbed crack path. The cohesive toughness increases from (0.059 ± 0.001) MPa.m~(1/2) to (0.063 ± 0.001) MPa.m~(1/2) after monochromatic UV curing.