Electrical Contacts of Metals to Carbon-Nanotubes for Applications to Electrical Coupling between Miniaturized Moving Parts and Sensors

摘要

Aligned carbon nanotubes were grown on electrodes by means of thermal chemical vapor deposition in mixtures of argon and acetylene using iron catalyst. These flexible, strong, and electrically conductive carbon nanotubes were used to couple electrical current between movable electrodes. Electrical contact resistance as a function of corrent loading, contact orientation, and distance between counter electrodes was measured. Methods of fabricating the carbon nanotube coated electrodes and potential applications t"f electrical coupling for moving parts in Micro-Electro-Mechanical Systems (MEMS), position sensitive sensors, and pressure sensors are discussed.