Fabrication of BSCCO thin films using sputtering technique

摘要

Investigation of BSCCO 2223 phase formation in superconducting thin films of Bi-based cuprates deposited on MgO substrate is reported. A series of films were made by in situ dc-magnetron sputtering method and another series were made by ex situ rf-magnetron sputtering technique. Same target have been used in both technique. In the case of the ex situ method, the films were annealed for different period of time at 800°C, and in the case of in situ method, the films were deposited at different temperature substrate. The influence of annealing time and the temperature of the substrate on the quality and the phase formation for ex situ and in situ method have studied, respectively. The results of our studies show, although the samples prepared by in situ method have a better mechanical and superconductivity properties, the post-annealed ex situ prepared samples have a superb structural and superconductivity properties.