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Low-loss photonic-crystal and monolithic InP integration : bands, bends, lasers, filters

机译:低损耗光子晶体和单片INP集成:带,弯曲,激光器,过滤器

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Practical realizations of 2D (planar) photonics crystal (PhC) are either on a membrane or etched through a conventional heterostructure. While fascinating objects can emerge from the first approach, only the latter approach lends itself to a progressive integration of more compact PhC's towards monolithic PICs based on InP. We describe in this talk the various aspects from technology to functions and devices, as emerged from the European collaboration "PCIC". The main technology tour de force is deep-etching with aspect ratio of about 10 and vertical sidewall, achieved by three techniques (CAIBE, ICP-RIE, ECR-RIE). The basic functions explored are bends, splitters/combiners, mirrors, tapers, and the devices are filters and lasers. At the end of the talk, I will emphasize some positive aspects of "broad" multimode PhC waveguides, in view of compact add-drop filtering action, notably.
机译:2D(平面)光子学晶体(PHC)的实际实现在膜上或通过常规异质结构蚀刻。虽然迷人的物体可以从第一种方法中出现,但后一种方法只能基于基于INP的更紧凑的PHC对单片照片的逐步集成。我们在欧洲协作“PCIC”中出现了从技术到功能和设备的各个方面。主要技术巡回赛量是深度蚀刻,宽高比约为10和垂直侧壁,通过三种技术(Cabe,ICP-RIE,ECR-RIE)实现。探索的基本功能是弯曲,分离器/组合器,镜子,棘爪,并且设备是过滤器和激光器。在谈话结束时,考虑到紧凑的添加滤波动作,我将强调“广泛”多模PHC波导的一些积极方面。

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