Large Vacuum Deposition Plants with Special Features

摘要

HPL has designed two large vacuum deposition plants in the recent years: 1) For deposition of large mirrors of maximum dia 2.1 mtr and weight 1.5 tons. 2) For deposition of auto reflectors with optimum capacity and a cycle time of as low as 600 secs. The specifications of both coating units are presented in detail. This paper also deals with the constructional aspects of the coating unit and the deposition sequence to achieve required results.