On the numerical modelling of a dc driven glow discharge plasma

摘要

We developed and tested two dimensional (axial-symmetric) models of a dc glow discharge in low pressure argon gas using two approaches. First, assembling the model from the "general form" COMSOL Multiphysics pde's, and second, using COMSOL's built-in "Plasma Module". Calculation results have been compared with those obtained from the CFD-ACE+ package. The discharge models are based on a fluid description of ions and excited neutral species with drift-diffusion approximation for the particle flux. The data for electron transport (diffusion coefficient and mobility) as well as the rates of electron-impact plasmachemical reactions are derived from solutions of Boltzmann equation for the electron energy distribution function and corresponding collision cross-sections. The self-consistent electric field is calculated using the Poisson equation.