New TiOx films with oriented growth doped by nitrogen and their antibacterial effect

摘要

The aim of this paper to show the antibacterial effect of thin titanium oxides films with oriented growth made by Glancing Angle Deposition (GLAD). The films were deposited by DC unbalanced magnetron sputtering at low temperature. Those layers were diagnosed by MFM and SEM. Incline columns architecture of thin films with different amount of oxygen was examined from the point of view of antibacterial effect. Two different deposition methods - RGCF (Recative Gas Constant Flow) and RGPP (Reactive Gas Pulsing Process) were used.