Energy efficiency and lifetime of machines and its components are of significant interest. It was found that friction and wear of elastomeric sealings could be improved using plasmapolymeric coatings (1), (2). The tribological improvement of sealings is available at low costs using a plasma enhanced chemical vapour deposition technique (PECVD). The related batch concept is based on applying coating on a high number of rotary shaft sealings. Easy to use component carriers were developed (3) achieving low production costs. Regarding high symmetry and optimized gas flow management a homogeneous deposition in the batch chamber and sealing components was realized.
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