IMPROVEMENT OF MEASUREMENT ACCURACY BY COMBINEDEVALUATION OF CMM AND TRACKING INTERFEROMETERMEASUREMENTS

摘要

This paper presents a novel approach to improve the accuracy of coordinate measuring machines (CMM) by integrating a single high precision tracking interferometer (TI) as an additional measurement axis. Improved positions are obtained by a combination of the CMM positions as read from the scales and the distances produced by the TI. Monte-Carlo simulations of length and flatness measurements show that the uncertainties can be reduced considerably by an appropriate configuration. First measurements confirm the results of preliminary simulations.