IMPROVEMENT OF MEASUREMENT ACCURACY BY COMBINEDEVALUATION OF CMM AND TRACKING INTERFEROMETERMEASUREMENTS

摘要

This paper presents a novel approach to improvethe accuracy of coordinate measuring machines (CMM) byintegrating a single high precision tracking interferometer(TI) as an additional measurement axis. Improved positionsare obtained by a combination of the CMM positions as readfrom the scales and the distances produced by the TI.Monte-Carlo simulations of length and flatness measurementsshow that the uncertainties can be reduced considerablyby an appropriate configuration. First measurementsconfirm the results of preliminary simulations.