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Non-linear temperature compensation for a micromachined Bi-directional thermal flow sensor

机译:用于微机械的双向热流传感器的非线性温度补偿

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Thermal flow sensors have been developed for a variety of applications over the years[l-4]. Their application in automotive environments with high accuracy, has been challenging due to the large (-40 to 125C) temperature range. To achieve an accuracy of 2% over this temperature range, special sensor construction, flow tube geometry and/or elaborate electronic compensation is required. We present here a mixed analog/digital compensation technique with non-linear TCO (Temperature Coefficient of offset) correction capability for a constant temperature Bidirectional airflow sensor. The resulting system (Figure 1) achieves sensitivity of 3mv/ % mass flow at idle flow rates (2-5 gm/sec) with an accuracy of 2%over a flow range of 2gm/sec - 100 gm/sec and intake temperature range.
机译:多年来,在各种应用中已经开发了热流传感器[L-4]。它们在高精度高精度的汽车环境中的应用,由于大(-40至125℃)温度范围,这一直挑战。为了在该温度范围内达到2%的精度,需要特殊的传感器结构,流量管几何和/或精细的电子补偿。这里我们在这里存在一种混合模拟/数字补偿技术,具有用于恒温双向气流传感器的非线性TCO(温度偏移的温度系数)校正能力。得到的系统(图1)在怠速流速(2-5GM / SEC)下实现3mV /%质量流量的灵敏度,精度为2gm / sec-100 gm / sec和进气温度范围的2% 。

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