A single-crystal silicon capacitive Dual-Axis Acceleration Sensor for a variety of applications has been developed. The sensor element itself is formed entirely from single crystal silicon, which gives it exceptional stability over time and temperature as well as excellent shock resistance. The sensor is produced using low-cost, high volume processing, test, and calibration. The micro-electromechanical system (MEMS) device contains an inertial mass, or proofmass, which moves in response to applied accelerations. The position of the proofmass is capacitively detected and processed by an interface integrated circuit (IC). The sensor/interface IC system is packaged in a small outline IC (SOIC) package for printed circuit board mounting. The module is designed to measure full-scale accelerations in the +/-5g to +/-60g ranges to suit a variety of automotive, industrial, and consumer applications (1g ≈ 9.8 m/s{sup}2).
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机译：开发了一种用于各种应用的单晶硅电容性双轴加速度传感器。传感器元件本身完全由单晶硅形成，其在时间和温度以及优异的抗冲击性上使其具有出色的稳定性。传感器采用低成本，高批量处理，测试和校准生产。微机电系统（MEMS）装置包含惯性质量或校样，其响应于应用的加速而移动。通过接口集成电路（IC）电容检测和处理校样的位置。传感器/接口IC系统包装在用于印刷电路板安装的小型轮廓IC（SOIC）封装中。该模块旨在衡量+/- 5G到+/- 60G范围内的全尺度加速，以适应各种汽车，工业和消费者应用（1G≈9.8M/ s {sup} 2）。
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