A single-crystal silicon capacitive Dual-Axis Acceleration Sensor for a variety of applications has been developed. The sensor element itself is formed entirely from single crystal silicon, which gives it exceptional stability over time and temperature as well as excellent shock resistance. The sensor is produced using low-cost, high volume processing, test, and calibration. The micro-electromechanical system (MEMS) device contains an inertial mass, or proofmass, which moves in response to applied accelerations. The position of the proofmass is capacitively detected and processed by an interface integrated circuit (IC). The sensor/interface IC system is packaged in a small outline IC (SOIC) package for printed circuit board mounting. The module is designed to measure full-scale accelerations in the +/-5g to +/-60g ranges to suit a variety of automotive, industrial, and consumer applications (1g ≈ 9.8 m/s~2).
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