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Chip on flex with 5-micron features

机译:芯片在柔性上,具有5微米特征

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摘要

A new module packaging method is proposed for electronic systems comprising a motherboard and integrated circuit (IC) chips. Pitches of 10 microns for conductive traces, and 100 microns for bonding pads are achievable. The enabling technology is glass panel manufacture, using equipment and techniques similar to those employed for fabricating liquid crystal display (LCD) panels. Flexible circuits are produced on a glass carrier using a release layer, and the carrier is removed after most of the processing is complete. IC chips are stud bumped and flip chip bonded to wells filled with solder, provided on the flexible circuit. The fabrication density achievable with wafer level packaging (WLP) using silicon wafers is substantially more than is needed for module packaging, as described herein. It is possible to provide WLP performance on glass at a much lower cost. The conductor features on glass are fine enough for the most demanding packaging and assembly techniques. The lowered cost of glass applies to the interconnection circuit plus assembly, test and rework. A test method called Tester-On-Board (TOB) is proposed, employing special-purpose test chips that are directly mounted in the system and mimic the capabilities of external testers. Methods for hermetic sealing, electromagnetic screening, and high-density off-board connections are also proposed.
机译:提出了一种新的模块包装方法,用于包括主板和集成电路(IC)芯片的电子系统。可以实现10微米的10微米,并且可以实现100微米用于粘合垫。启用技术是玻璃面板制造,使用类似于用于制造液晶显示器(LCD)面板的设备和技术。使用释放层在玻璃载体上产生柔性电路,并且在大部分加工完成后移除载体。 IC芯片是螺柱凸起的,倒装芯片粘合到填充有焊料的井,提供在柔性电路上。如本文所述,使用硅晶片使用硅晶片(WLP)可实现的制造密度基本上大于模块包装所需的。可以以更低的成本在玻璃上提供WLP性能。对于最苛刻的包装和装配技术,玻璃上的导体功能足够精细。降低的玻璃成本适用于互连电路加上装配,测试和返工。提出了一种称为测试仪车载(TOB)的测试方法,采用直接安装在系统中的专用测试芯片并模仿外部测试仪的能力。还提出了气密密封,电磁筛选和高密度的脱机连接的方法。

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