Design Optimization of Micromachined High Aspect Ratio 3D On-chip Solenoid Inductor

摘要

This paper presents the simulation works done by using Sonnet EM~(TM) on high-aspect-ratio 3D on chip solenoid inductor. In order to discover the dependence of inductor performance on different dielectric materials covering the substrate, via heights, via separation distances, conductor dimensions, a variety of designs have been demonstrated and their behaviors under different circumstances have been characterized. In conclusion, we found that high-aspect-ratio 3D solenoid inductors provide better RF performance than previously fabricated low-aspect-ratio 3D solenoid and dome-shape spiral inductors.